AlN/AlGaN superlattices as dislocation filter for low-threading-dislocation thick AlGaN layers on sapphire

✍ Scribed by Wang, Hong-Mei; Zhang, Jian-Ping; Chen, Chang-Qing; Fareed, Q.; Yang, Jin-Wei; Khan, M. Asif

• Book ID: 120471674
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 380 KB
• Volume: 81
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1494858