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Correlation of microstructure and composition of sputtered titanium nitride films with electrical and optical properties

โœ Scribed by Thorpe, T. P.; Elam, W. T.; Morrish, A.


Book ID
111915648
Publisher
AVS (American Vacuum Society)
Year
1987
Tongue
English
Weight
323 KB
Volume
5
Category
Article
ISSN
0734-2101

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