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Microstructure and optical properties of zinc nitride films deposited by magnetron sputtering method

โœ Scribed by A.H. Jayatissa; T. Wen


Book ID
118001307
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
846 KB
Volume
211
Category
Article
ISSN
0257-8972

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Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el