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Sputtered deposited nanocrystalline ZnO films: A correlation between electrical, optical and microstructural properties

✍ Scribed by J. Lee; W. Gao; Z. Li; M. Hodgson; J. Metson; H. Gong; U. Pal

Publisher
Springer
Year
2005
Tongue
English
Weight
652 KB
Volume
80
Category
Article
ISSN
1432-0630

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## Abstract The effect of bias voltage on characteristics of ZnO thin films deposited by the electron cyclotron resonance plasma‐enhanced chemical vapor deposition (ECR‐PECVD) method was investigated. The structural, optical and electrical properties of ZnO thin films were studied as a function of