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Correlation of device performance and defects in AlGaN/GaN high-electron mobility transistors

✍ Scribed by A. P. Zhang; L. B. Rowland; E. B. Kaminsky; V. Tilak; J. C. Grande; J. Teetsov; A. Vertiatchikh; L. F. Eastman


Book ID
107453028
Publisher
Springer US
Year
2003
Tongue
English
Weight
978 KB
Volume
32
Category
Article
ISSN
0361-5235

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Traps and defects in pre- and post- stre
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## Abstract We used deep level transient spectroscopy (DLTS) and HR‐TEM techniques to study traps and defects in pre‐ and post‐stressed AlGaN/GaN high electron mobility transistors (HEMTs) grown by MOCVD on semi‐insulating SiC substrates. DLTS identified two dominant traps with activation energies