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Correlation between structural defects and optical properties in ion-implanted silicon

✍ Scribed by Wesch, W. ;Glaser, B. ;Götz, G. ;Karge, H. ;Prager, R.

Publisher
John Wiley and Sons
Year
1981
Tongue
English
Weight
582 KB
Volume
65
Category
Article
ISSN
0031-8965

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## Abstract ZnO substrates and films were intentionally implanted with rare earth and transition metal ions. The influence of the implantation and subsequent air thermal annealing treatments on the structural and optical properties of ZnO samples were studied by using Rutherford backscattering spec