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Abnormally Deep Structural Changes in Ion-Implanted Silicon

✍ Scribed by Pavlov, P. V. ;Tetelbaum, D. I. ;Skupov, V. D. ;Semin, Yu. A. ;Zorina, G. V.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 452 KB
Volume: 94
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210940151

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