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Control of sputtering in a modified magnetron-typed radio-frequency discharge

✍ Scribed by Yunlong Li; Satoru Iizuka; Noriyoshi Sato

Book ID: 114169461
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 337 KB
Volume: 132
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00482-5

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