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Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

✍ Scribed by J.M. Khoshman; W.D. Jennings; M.E. Kordesch

Book ID: 108063862
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 775 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.01.079

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