Control of impurity diffusion in silicon
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K. Shirai; K. Matsukawa; T. Moriwaki; Y. Ikemoto
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Article
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2009
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Elsevier Science
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English
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We report a first-time attempt of diffusion control of impurities by IR excitation, by using an intensive synchrotron radiation facility, BL43IR of SPring-8. Although the result is discouraging, the plan, experimental setup, irradiation experiment, and the result on the impurity diffusion, are descr