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Mechanism of impurity diffusion in a-Si:H and diffusion blocking by fluorine inclusion

✍ Scribed by Hideki Matsumura; Kunihiro Sakai; Masaaki Maeda; Seijiro Furukawa

Publisher
Elsevier Science
Year
1983
Weight
228 KB
Volume
117-118
Category
Article
ISSN
0378-4363

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