Considerations for further scaling of metal–insulator–metal DRAM capacitors

✍ Scribed by Kaczer, B. ;Clima, S. ;Tomida, K. ;Govoreanu, B. ;Popovici, M. ;Kim, M.-S. ;Swerts, J. ;Belmonte, A. ;Wang, W.-C. ;Afanas'ev, V. V. ;Verhulst, A. S. ;Pourtois, G. ;Groeseneken, G. ;Jurczak, M.

• Book ID: 121850123
• Publisher: AVS (American Vacuum Society)
• Year: 2013
• Tongue: English
• Weight: 865 KB
• Volume: 31
• Category: Article
• ISSN: 1520-8567
• DOI: 10.1116/1.4767125