✦ LIBER ✦
$\hbox{TiN/ZrO}_{2}$/Ti/Al Metal–Insulator–Metal Capacitors With Subnanometer CET Using ALD-Deposited $\hbox{ZrO}_{2}$ for DRAM Applications
✍ Scribed by S. Monaghan; K. Cherkaoui; E. O'connor; V. Djara; P. Hurley; L. Oberbeck; E. Tois; L. Wilde; S. Teichert
- Book ID
- 126654562
- Publisher
- IEEE
- Year
- 2009
- Tongue
- English
- Weight
- 250 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0741-3106
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