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Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors

✍ Scribed by Van Huylenbroeck, S.; Decoutere, S.; Venegas, R.; Jenei, S.; Winderickx, G.

Book ID: 120060342
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 202 KB
Volume: 23
Category: Article
ISSN: 0741-3106
DOI: 10.1109/55.992835

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