Scaling considerations and dielectric breakdown improvement of a corrugated capacitor cell for a future dRAM

✍ Scribed by Sunami, H.; Kure, T.; Yagi, K.; Wada, Y.; Yamaguchi, K.; Miyazawa, H.; Shimizu, S.

• Book ID: 114595061
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 741 KB
• Volume: 32
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1985.21942