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Compositional and structural analysis of RF magnetron sputtered La3+-modified PZT thin films

✍ Scribed by Ravindra Singh; B.R. Chakraborty; Nahar Singh; Harish Bahadur; T.C. Goel; Sudhir Chandra

Book ID
108178923
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
707 KB
Volume
209
Category
Article
ISSN
0924-0136

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In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films h