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Composition spread metal thin film fabrication technique based on ion beam sputter deposition

✍ Scribed by P. Ahmet; T. Nagata; D. Kukuruznyak; S. Yagyu; Y. Wakayama; M. Yoshitake; T. Chikyow

Book ID: 103817616
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 288 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.05.078

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