Cu-Al-O thin films were prepared by rf magnetron sputtering. By adjusting oxygen partial pressure, the effect of oxygen on optical transmission and electrical properties of the films were investigated. The films exhibit good transparency in the visible range. As oxygen partial pressure is above 30%,
β¦ LIBER β¦
Transparent oxygen impermeable AlOx thin films on polycarbonate deposited by reactive ion beam sputtering
β Scribed by Jin-Wook Seong; Sang-Mun Kim; Daiwon Choi; K.H. Yoon
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 284 KB
- Volume
- 249
- Category
- Article
- ISSN
- 0169-4332
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