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Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering

✍ Scribed by Qinghua Kong; Li Ji; Hongxuan Li; Xiaohong Liu; Yongjun Wang; Jianmin Chen; Huidi Zhou

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
923 KB
Volume
257
Category
Article
ISSN
0169-4332

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