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Composition-controlled growth of PbTiO3 on SrTiO3 by organometallic chemical vapour deposition

✍ Scribed by G.J.M. Dormans; P.J. van Veldhoven; M. de Keijser

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
650 KB
Volume
123
Category
Article
ISSN
0022-0248

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Thin films of CaCu 3 Ti 4 O 12 (CCTO) are successfully deposited by metal-organic (MO)CVD on (001)SrTiO 3 substrates. An interesting approach, based on a molten multi-component precursor source, is applied. The molten mixture consists of the Ca(hfa) 2 tetraglyme, Ti(tmhd) 2 (O i Pr) 2 , and Cu(tmhd)