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Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine

✍ Scribed by Kouvetakis, J.

Book ID: 121819829
Publisher: AVS (American Vacuum Society)
Year: 1990
Tongue: English
Weight: 592 KB
Volume: 8
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.576423

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