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Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering

✍ Scribed by L. Yate; J.C. Caicedo; A. Hurtado Macias; F.J. Espinoza-Beltrán; G. Zambrano; J. Muñoz-Saldaña; P. Prieto

No coin nor oath required. For personal study only.

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