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Optical and electrical properties of SnOx thin films made by reactive r.f. magnetron sputtering

โœ Scribed by B Stjerna; C.G Granqvist

Book ID
113204956
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
347 KB
Volume
193-194
Category
Article
ISSN
0040-6090

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp