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Composition and chemical state of titanium nitride films obtained by different methods

✍ Scribed by J.S. Colligon; H. Kheyrandish; L.N. Lesnevsky; A. Naumkin; A. Rogozin; I.I. Shkarban; L. Vasilyev; V.E. Yurasova


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
845 KB
Volume
70
Category
Article
ISSN
0257-8972

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