Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method

✍ Scribed by L. Hiltunen; M. Leskelä; M. Mäkelä; L. Niinistö; E. Nykänen; P. Soininen

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 288 KB
• Volume: 166
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90375-6