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Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems

✍ Scribed by Damean, Nicolae; Parviz, Babak A; Lee, Jessamine Ng; Odom, Teri; Whitesides, George M

Book ID: 125420174
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 338 KB
Volume: 15
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/15/1/005

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