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Correlation between sputtering parameters and composition of SmCo-based films for microelectromechanical system applications

✍ Scribed by Peng, Long; Zhang, Huaiwu; Yang, Qinghui; Li, Yuanxun; Song, Yuanqiang; Shen, Jian

Book ID: 120457490
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 805 KB
Volume: 105
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3098230

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