✦ LIBER ✦
Characterisation of the fabrication process of freestanding SU-8 microstructures integrated in printing circuit board in microelectromechanical systems
✍ Scribed by Perdigones, F.; Moreno, J.M.; Luque, A.; Quero, J.M.
- Book ID
- 114461345
- Publisher
- The Institution of Engineering and Technology
- Year
- 2010
- Tongue
- English
- Weight
- 500 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1750-0443
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