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Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry

✍ Scribed by D. Franta; I. Ohlídal; D. Munzar; J. Hora; K. Navrátil; C. Manfredotti; F. Fizzotti; C. Vittone

Book ID
114086650
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
383 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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