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Optical characterization of TiN/SiO2(1000 nm)/Si system by spectroscopic ellipsometry and reflectometry

✍ Scribed by K Postava; M Aoyama; T Yamaguchi

Book ID
108417404
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
141 KB
Volume
175-176
Category
Article
ISSN
0169-4332

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✍ OhlΓ­dal, I.; Franta, D.; Pinčík, E.; OhlΓ­dal, M. πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 78 KB πŸ‘ 2 views

In this paper results concerning optical analysis of the SiO 2 =Si system performed by the combined ellipsometric and reflectometric method used in multiple-sample modification will be presented. This method is based on combining both the single-wavelength method and the dispersion method. Three mod