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Complete characterization of rough polymorphous silicon films by atomic force microscopy and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry

✍ Scribed by Daniel Franta; Ivan Ohlı́dal; Petr Klapetek; Pere Roca i Cabarrocas

Book ID
113936696
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
122 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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