Effect of Si nanoparticles embedded in S
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A. Szekeres; T. Nikolova; A. Paneva; I. Lisovskyy; P.E. Shepeliavyi; G.Yu. Rudko
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Article
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2008
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Elsevier Science
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English
⚖ 210 KB
The optical properties of silicon oxide (SiO x ) films, vacuum evaporated and thermally annealed in argon atmosphere at 700 °C and 1000 °C, have been studied by spectral ellipsometry and photoluminescence (PL) measurements. The thickness, complex refractive index values and composition of the films,