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Optical properties of diamond-like carbon films containing SiOx studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry

✍ Scribed by Daniel Franta; Ivan Ohlı́dal; Vilma Buršı́ková; Lenka Zajı́čková


Book ID
113936695
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
142 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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The optical properties of silicon oxide (SiO x ) films, vacuum evaporated and thermally annealed in argon atmosphere at 700 °C and 1000 °C, have been studied by spectral ellipsometry and photoluminescence (PL) measurements. The thickness, complex refractive index values and composition of the films,