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Comparison of the properties of BN films synthesized by inductively coupled r.f. and microwave plasmas

✍ Scribed by F. Kiel; M. Cotarelo; M.P. Delplancke; R. Winand

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
632 KB
Volume
270
Category
Article
ISSN
0040-6090

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