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Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry

✍ Scribed by Fang, S. J.; Chen, W.; Yamanaka, T.; Helms, C. R.

Book ID: 121313294
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 324 KB
Volume: 68
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.116341

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