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A simulation study for evaluating and improving the accuracy of surface roughness measured by atomic force microscopy

✍ Scribed by Wang, Chunmei; Itoh, Hiroshi

Book ID: 118745404
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 740 KB
Volume: 24
Category: Article
ISSN: 0957-0233
DOI: 10.1088/0957-0233/24/3/035401

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