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Comparison of properties of solid phase epitaxial silicon on sapphire films recrystallized by rapid thermal annealing and furnace annealing

✍ Scribed by Qiyuan Wang; Yude Zan; Jianhua Wang; Yuanhuan Yu

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
278 KB
Volume
29
Category
Article
ISSN
0921-5107

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