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A study on WSi2 thin films, formed by the reaction of tungsten with solid or liquid silicon, by rapid thermal annealing

✍ Scribed by M. Döscher; M. Pauli; J. Müller


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
882 KB
Volume
239
Category
Article
ISSN
0040-6090

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