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Comparison of measurements and simulation results in 300 mm CZ silicon crystal growth

โœ Scribed by YU, G; HAILING, T; QIGANG, Z; XIAOLIN, D; QINGHUA, X

Book ID
123443044
Publisher
Nonferrous Metals Society of China
Year
2007
Tongue
English
Weight
314 KB
Volume
26
Category
Article
ISSN
1001-0521

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