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Growth and stress analysis of necks for 300 mm CZ silicon single crystals

โœ Scribed by H. Tu; J. Cheng; Q. Chang; Q. Zhou; J. Wang; G. Zhang; F. Fang

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
249 KB
Volume
56
Category
Article
ISSN
0167-9317

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โœฆ Synopsis

Growth of large diameter necks is of great importance for 300 mm silicon single crystals. Tensile tests for necks with different diameter have been made, and then the fracture morphology of the necks has been analyzed by scanning electron microscopy (SEM). The surface morphology demonstrates that the fracture is fragile. The large seeds can support crystals grown from large charge sizes of poly-silicon. It is indicated that the neck growth conditions have certain effects on the tensile stress limit of the necks. The fracture mechanism of necks has been discussed in the paper.

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