Application of dynamic and combined magnetic fields in the 300 mm silicon single-crystal growth

✍ Scribed by Erich Tomzig; Janis Virbulis; Wilfried von Ammon; Yuri Gelfgat; Leonid Gorbunov

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 338 KB
• Volume: 5
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(02)00134-8