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Comparison of intrinsic residual stress models in metallic thin films

✍ Scribed by G. Guisbiers; M. Wautelet; L. Buchaillot


Book ID
113897650
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
168 KB
Volume
60
Category
Article
ISSN
1359-6462

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πŸ“œ SIMILAR VOLUMES


Nanoparticulate origin of intrinsic resi
✍ G. Guisbiers; O. Van Overschelde; M. Wautelet πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 176 KB

The formation of grains in thin films generates intrinsic residual stress. In this work, we present a model of intrinsic residual stress calculation based on the size-dependent phase transitions of the nanograins. Evaporated thin films are produced by condensation from the vapor on the substrate. It