Nanoparticulate origin of intrinsic resi
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G. Guisbiers; O. Van Overschelde; M. Wautelet
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Article
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2007
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Elsevier Science
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English
β 176 KB
The formation of grains in thin films generates intrinsic residual stress. In this work, we present a model of intrinsic residual stress calculation based on the size-dependent phase transitions of the nanograins. Evaporated thin films are produced by condensation from the vapor on the substrate. It