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Surface stress model for intrinsic stresses in thin films

โœ Scribed by Cammarata, R. C.; Trimble, T. M.; Srolovitz, D. J.


Book ID
126478723
Publisher
Cambridge University Press
Year
2000
Tongue
English
Weight
107 KB
Volume
15
Category
Article
ISSN
0884-2914

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The formation of grains in thin films generates intrinsic residual stress. In this work, we present a model of intrinsic residual stress calculation based on the size-dependent phase transitions of the nanograins. Evaporated thin films are produced by condensation from the vapor on the substrate. It