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Comparison of characteristics and integration of copper diffusion-barrier dielectrics

โœ Scribed by T.C. Wang; Y.L. Cheng; Y.L. Wang; T.E. Hsieh; G.J. Hwang; C.F. Chen

Book ID
108288920
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
349 KB
Volume
498
Category
Article
ISSN
0040-6090

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