Characteristic of a dielectric barrier discharges using capillary dielectric and its application to photoresist etching

✍ Scribed by Chang-heon Yi; Yong-hyuk Lee; Dong Woo Kim; Geun-young Yeom

• Book ID: 108423133
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 110 KB
• Volume: 163-164
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(02)00649-7