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Comparison of beam-induced profile broadening effects of gallium and copper in oxygen-bombarded silicon

✍ Scribed by Yoshikazu Homma; Tetsuya Maruo

Book ID: 104592378
Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 519 KB
Volume: 14
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.740141108

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