Comparative Study of the Stress in Chromium Films Deposited by Vacuum Arc Evaporation, Vacuum Evaporation, and DC Magnetron Sputtering

✍ Scribed by Elstner, F. ;Gautier, C. ;Piot, O. ;Contoux, G. ;Cosset, F. ;Nardou, F. ;Machet, J.

• Publisher: John Wiley and Sons
• Year: 1996
• Tongue: English
• Weight: 626 KB
• Volume: 154
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211540220