1151. Some problems of performance in the film deposition by evaporation and condensation in vacuum: A S Valeev and V L Evdokimov, elektron tekh mikroelektron, 4, 1970, 40–48 (in Russian).

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 144 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92312-8