Some problems of performance in thin film deposition by evaporation and condensation in vacuum : A. S. Valeev and V. L. Evdokimov. Elektron. Tekh. Mikroelektron. 4 (1970), p. 40. (In Russian.)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 110 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90556-2