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Comparative investigations of the measurement capabilities of atomic-force microscopy and optical interferometry methods

✍ Scribed by A. S. Gusev; V. L. Lyaskovskii; D. V. Voloshin; S. Yu. Zolotarevskii

Publisher
Springer US
Year
2010
Tongue
English
Weight
130 KB
Volume
53
Category
Article
ISSN
0543-1972

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