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Comparative composition analysis of SiOxand SiNxthin films by AES, EDX and RBS

✍ Scribed by I. Sieber, A. Schöpke, B. Selle

Book ID: 120751776
Publisher: Springer
Year: 1995
Tongue: English
Weight: 244 KB
Volume: 353
Category: Article
ISSN: 1618-2650
DOI: 10.1007/BF00321340

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